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IMEC creates first 5nm chip.

CalmOceansCalmOceans Member UncommonPosts: 2,437
http://www.electronicsweekly.com/news/business/manufacturing/imec-and-cadence-tape-out-first-5nm-ic-2015-10/

LEUVEN, Belgium and SAN JOSE, Calif., October 7, 2015—Nano-electronics research center imec and Cadence Design Systems, Inc. (NASDAQ: CDNS) today announced that the companies completed the first tapeout of a 5nm test chip using extreme ultraviolet (EUV) as well as 193 immersion (193i) lithography. To produce this test chip, imec and Cadence optimized design rules, libraries and place-and-route technology to obtain optimal power, performance and area (PPA) scaling via Cadence® Innovus™ Implementation System. Using a processor design, imec and Cadence successfully taped out a set of designs using EUV lithography as well as Self-Aligned Quadruple Patterning (SAQP) for 193i lithography, where metal pitches were scaled from the nominal 32nm pitch down to 24nm to push the limit of patterning.


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